The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 15, 2020
Filed:
May. 31, 2017
Applicant:
Siltronic Ag, Munich, DE;
Inventor:
Joerg Haberecht, Freiberg, DE;
Assignee:
SILTRONIC AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 25/12 (2006.01); C23C 16/458 (2006.01); C30B 29/06 (2006.01); H01L 21/02 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
C30B 25/12 (2013.01); C23C 16/4585 (2013.01); C30B 29/06 (2013.01); H01L 21/02433 (2013.01); H01L 21/68735 (2013.01);
Abstract
A susceptor for holding a semiconductor wafer during the deposition of an epitaxial layer on a front side of the semiconductor wafer, has a susceptor ring and a susceptor base, and recesses below the susceptor ring in the susceptor base which are arranged in a manner distributed rotationally symmetrically. The radial width of the recesses is greater than the radial width of the susceptor such that the susceptor ring does not completely cover the recesses.