The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2020
Filed:
Sep. 04, 2019
Applicant:
Gigaphoton Inc., Tochigi, JP;
Inventors:
Shinji Okazaki, Oyama, JP;
Osamu Wakabayashi, Oyama, JP;
Assignee:
Gigaphoton Inc., Tochigi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05H 7/06 (2006.01); G03F 7/20 (2006.01); H05H 7/04 (2006.01);
U.S. Cl.
CPC ...
H05H 7/06 (2013.01); G03F 7/70033 (2013.01); H05H 7/04 (2013.01); H05H 2007/041 (2013.01); H05H 2007/046 (2013.01);
Abstract
An EUV light generator including the following components: A. an electron storage ring including a first linear section and a second linear section; B. an electron supplier configured to supply the electron storage ring with an electron bunch; C. a high-frequency acceleration cavity disposed in the first linear section and configured to accelerate the electron bunch in such a way that a length Lez of the electron bunch satisfies '0.09 m≤Lez≤3 m;' and D. an undulator disposed in the second linear section and configured to output EUV light when the electron bunch enters the undulator.