The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2020
Filed:
Oct. 26, 2017
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Inventors:
Jen-Ti Wang, Taichung, TW;
Chih-Wei Lin, Hsinchu, TW;
Fu-Hsien Li, Taichung, TW;
Yi-Ming Chen, Taipei County, TW;
Cheng-Ho Hung, Tainan, TW;
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); G01N 33/00 (2006.01); B23P 6/00 (2006.01); H01L 21/66 (2006.01); G01B 11/24 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01); B25J 18/00 (2006.01); B25J 1/04 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0201 (2013.01); B23P 6/00 (2013.01); G01B 11/24 (2013.01); G01N 33/0004 (2013.01); G01N 33/0031 (2013.01); G01N 33/0065 (2013.01); H01L 21/673 (2013.01); H01L 21/67389 (2013.01); H01L 21/67393 (2013.01); H01L 21/67733 (2013.01); H01L 21/67736 (2013.01); H01L 21/67775 (2013.01); H01L 22/30 (2013.01); B25J 1/04 (2013.01); B25J 18/00 (2013.01); G01N 33/0013 (2013.01); G01N 33/0024 (2013.01); G01N 33/0029 (2013.01); G01N 33/0062 (2013.01); G01N 33/0063 (2013.01); G01N 2033/0095 (2013.01); H01L 21/02043 (2013.01); H01L 21/02049 (2013.01); H01L 21/67778 (2013.01); Y10T 29/49769 (2015.01); Y10T 29/49771 (2015.01);
Abstract
A method includes receiving a carrier with a plurality of wafers inside; supplying a purge gas to an inlet of the carrier; extracting an exhaust gas from an outlet of the carrier; and generating a health indicator of the carrier while performing the supplying of the purge gas and the extracting of the exhaust gas.