The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2020
Filed:
Dec. 17, 2018
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Ren-Chyi You, Yilan County, TW;
An-Wei Peng, Hsinchu, TW;
Chang-Zong Liu, Hsinchu, TW;
Jun-Sheng Yeh, New Taipei, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
A method is disclosed and includes generating a tool-lot relationship based on at least one process constraint and a dispatching rule which includes dispatching preferences for operating at least one lot; assigning the at least one lot to at least one tool by using the tool-lot relationship; and the at least one tool, assigned using the tool-lot relationship, processing the at least one lot by utilization of the tool-lot relationship to manufacture semiconductor devices on at least one wafer in the at least one lot.