The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2020
Filed:
Mar. 06, 2018
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Holger Walter, Abtsgmuend, DE;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/00 (2006.01); G02B 26/08 (2006.01); G02B 26/06 (2006.01); G03F 7/20 (2006.01); G02B 3/04 (2006.01); G02B 3/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0875 (2013.01); G02B 3/04 (2013.01); G02B 26/06 (2013.01); G02B 27/0068 (2013.01); G03F 7/7015 (2013.01); G03F 7/70191 (2013.01); G03F 7/70308 (2013.01); G02B 3/0081 (2013.01);
Abstract
An optical correction arrangement includes a first and a second correction component arranged in succession along an optical axis. The first and the second correction components are provided with aspherical surface contours which at least approximately add up to zero overall in a zero position of the optical correction arrangement. The optical correction arrangement also includes a manipulator for displacing the first correction component in a first direction at a first speed and for displacing the second correction component in a second direction at a second speed. The first speed is greater than the second speed.