The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2020

Filed:

Apr. 26, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Tsung-Sheng Kuo, New Taipei, TW;

Chih-Hung Huang, Hsinchu County, TW;

Ming-Hsien Tsai, Taoyuan, TW;

Yang-Ann Chu, Hsinchu, TW;

Hsuan Lee, Tainan, TW;

Jiun-Rong Pai, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/677 (2006.01); B65G 47/91 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67766 (2013.01); B65G 47/91 (2013.01); H01L 21/67742 (2013.01); H01L 21/67772 (2013.01);
Abstract

A wafer carrier handling apparatus includes a housing, a platform, a moving mechanism and a door storage device. The platform is configured to hold a wafer carrier. The moving mechanism is connected to the housing and configured to move the platform with respect to the housing. The door storage device is disposed above the housing. The door storage device has a first door storage zone. The first door storage zone is configured to allow a door of the wafer carrier to be held thereon.


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