The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2020
Filed:
Apr. 01, 2019
Applicant:
Sandisk Technologies Llc, Addison, TX (US);
Inventors:
Assignee:
SANDISK TECHNOLOGIES LLC, Addison, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/557 (2017.01); H01L 21/66 (2006.01); G06T 7/00 (2017.01); H04N 5/225 (2006.01); H01L 27/11556 (2017.01); H01L 27/11582 (2017.01); H01L 27/11565 (2017.01); H01L 27/11519 (2017.01);
U.S. Cl.
CPC ...
G06T 7/557 (2017.01); G06T 7/0004 (2013.01); H01L 22/12 (2013.01); H04N 5/22541 (2018.08); G06T 2207/10028 (2013.01); G06T 2207/10052 (2013.01); G06T 2207/20221 (2013.01); G06T 2207/20224 (2013.01); G06T 2207/30148 (2013.01); H01L 27/11519 (2013.01); H01L 27/11556 (2013.01); H01L 27/11565 (2013.01); H01L 27/11582 (2013.01);
Abstract
A method of inspecting a device under test for defects includes detecting intensity and directional information of radiation rays emanating from a device under test by a light field camera, generating synthesized images of the device under test detected by the light field camera, and determining a depth of a defect in the device under test from the synthesized images.