The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2020
Filed:
Jan. 16, 2019
Applied Material Israel, Ltd., Rehovot, IL;
Elad Cohen, Beer Sheva, IL;
Denis Simakov, Rehovot, IL;
APPLIED MATERIAL ISRAEL, LTD., Rehovot, IL;
Abstract
There are provided a system and method of defect detection on a specimen, the method comprising: performing partitioning for each of one or more portions of a first die; receiving one or more noise maps indicative of noise distribution on second images captured for one or more portions of a second die; performing segmentation for each noise map in runtime, the segmentation for a given noise map including: calculating a score for each region, the given noise map aligned with the regions and each region is associated with noise data aligned therein, the score for a given region calculated at least based on the noise data associated therewith; and associating each region with one segmentation label of a predefined set of segmentation labels indicative of noise levels based on the score, thereby obtaining a set of segments each corresponding to one or more regions associated with the same segmentation label.