The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2020
Filed:
Jan. 29, 2018
Tokyo Electron Limited, Tokyo, JP;
Yousuke Mine, Kumamoto, JP;
Kazuhito Miyazaki, Kumamoto, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
Disclosed is a coating device which draws a pattern of a functional liquid on a substrate. The coating device includes: a substrate holding unit which holds the substrate; a droplet discharging unit which discharges a droplet of the functional liquid on the substrate held by the substrate holding unit; a moving unit which relatively moves the substrate holding unit and the droplet discharging unit in a main scanning direction and a sub scanning direction on a base; a mass measuring unit including a cup which receives the droplet discharged by the droplet discharging unit and a mass measuring device which measures a mass of the functional liquid accumulated in the cup; and a liquid drain unit which drains the functional liquid accumulated in the cup.