The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Dec. 05, 2018
Disco Corporation, Tokyo, JP;
Sakae Matsuzaki, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A method of manufacturing device chips includes the steps of placing a workpiece on a table with a sheet of an insulating material being interposed between the table and the workpiece, attracting the sheet to the workpiece under electrostatic forces by applying a voltage between electrodes in the table to polarize the workpiece and the sheet, unloading the workpiece with the sheet attracted thereto from the table, processing the workpiece with the sheet attracted thereto to divide the workpiece into a plurality of device chips that correspond respectively to devices, and peeling off the device chips from the sheet by bringing an electrically conductive probe into contact with one, at a time, of areas of the sheet that correspond respectively to the device chips and applying a voltage to the probe thereby to release the sheet from the device chips that have attracted the sheet.