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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10847399 B1

PDFFull Text
Date of Patent:
Nov. 24, 2020

Filed:

Apr. 06, 2018

Movable structure and film forming apparatus

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Manabu Nakagawasai, Tokyo, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Fenwick & West LLP

Primary Examiner:

Yuechuan Yu

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01); C23C 14/35 (2006.01); H01J 37/32 (2006.01); C23C 16/46 (2006.01); H01L 21/02 (2006.01); C23C 16/458 (2006.01); C23C 14/50 (2006.01); H01L 21/687 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6831 (2013.01); C23C 14/358 (2013.01); C23C 14/505 (2013.01); C23C 14/54 (2013.01); C23C 14/541 (2013.01); C23C 16/4586 (2013.01); C23C 16/463 (2013.01); H01J 37/32036 (2013.01); H01L 21/0262 (2013.01); H01L 21/6719 (2013.01); H01L 21/67098 (2013.01); H01L 21/67248 (2013.01); H01L 21/67739 (2013.01); H01L 21/68742 (2013.01); H01L 21/68764 (2013.01); H01L 21/68792 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01);
Abstract

A movable structure includes a processing chamber configured to perform processing under a vacuum environment; a fixed portion disposed in the processing chamber; a movable portion that is movable with respect to the fixed portion; a transmission/reception module provided at the fixed portion and having a hermetically sealed structure; and a sensor module provided at the movable portion and having a hermetically sealed structure. The transmission/reception module and the sensor module perform transmission and reception of signals in a non-contact manner.

Find Patent Forward Citations

Nakagawasai, Manabu. (2020). Movable structure and film forming apparatus (U.S. Patent No. 10847399). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10847399

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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