The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Apr. 06, 2018
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Manabu Nakagawasai, Tokyo, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01L 21/677 (2006.01); H01L 21/67 (2006.01); C23C 14/35 (2006.01); H01J 37/32 (2006.01); C23C 16/46 (2006.01); H01L 21/02 (2006.01); C23C 16/458 (2006.01); C23C 14/50 (2006.01); H01L 21/687 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6831 (2013.01); C23C 14/358 (2013.01); C23C 14/505 (2013.01); C23C 14/54 (2013.01); C23C 14/541 (2013.01); C23C 16/4586 (2013.01); C23C 16/463 (2013.01); H01J 37/32036 (2013.01); H01L 21/0262 (2013.01); H01L 21/6719 (2013.01); H01L 21/67098 (2013.01); H01L 21/67248 (2013.01); H01L 21/67739 (2013.01); H01L 21/68742 (2013.01); H01L 21/68764 (2013.01); H01L 21/68792 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01);
Abstract
A movable structure includes a processing chamber configured to perform processing under a vacuum environment; a fixed portion disposed in the processing chamber; a movable portion that is movable with respect to the fixed portion; a transmission/reception module provided at the fixed portion and having a hermetically sealed structure; and a sensor module provided at the movable portion and having a hermetically sealed structure. The transmission/reception module and the sensor module perform transmission and reception of signals in a non-contact manner.