The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 24, 2020

Filed:

Feb. 19, 2018
Applicant:

Mochii, Inc., Seattle, WA (US);

Inventors:

Christopher Su-Yan Own, Seattle, WA (US);

Matthew Francis Murfitt, Seattle, WA (US);

Assignee:

Mochii, Inc., Seattle, WA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/28 (2006.01); C23C 14/54 (2006.01); C23C 14/52 (2006.01); C23C 14/24 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/10 (2006.01); H01J 37/20 (2006.01); H01J 37/18 (2006.01);
U.S. Cl.
CPC ...
H01J 37/28 (2013.01); C23C 14/24 (2013.01); C23C 14/52 (2013.01); C23C 14/54 (2013.01); H01J 37/10 (2013.01); H01J 37/18 (2013.01); H01J 37/20 (2013.01); H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 2237/0203 (2013.01);
Abstract

A charged-particle beam microscope is provided for imaging a sample. The microscope has a vacuum chamber to maintain a low-pressure environment. A stage is provided to hold a sample in the vacuum chamber. The microscope has a charged-particle beam source to generate a charged-particle beam. The microscope also has charged-particle beam optics to converge the charged-particle beam onto the sample and a detector to detect charged-particle radiation emanating from the sample. The microscope has a controller to analyze the detected charged-particle radiation to generate an image of the sample. A power supply is provided that has a battery to power at least the charged-particle beam optics and the controller.


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