The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Mar. 08, 2018
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Marco Matheus Louis Steeghs, Sevenum, NL;
Tian Gang, Best, NL;
Mehdi Yousefi Moghaddam, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G01J 1/42 (2006.01); G02B 26/08 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70133 (2013.01); G01J 1/429 (2013.01); G01J 1/4257 (2013.01); G02B 26/0833 (2013.01); G03F 7/702 (2013.01); G03F 7/70108 (2013.01); G03F 7/70116 (2013.01); G03F 7/70291 (2013.01); G03F 7/70891 (2013.01);
Abstract
A mirror array, at least some of the mirrors of the array comprising a reflective surface and an arm which extends from a surface opposite to the reflective surface, wherein the mirror array further comprises a support structure provided with a plurality of sensing apparatuses, the sensing apparatuses being configured to measure gaps between the sensing apparatuses and the arms which extend from the mirrors.