The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 24, 2020

Filed:

Oct. 29, 2018
Applicant:

Keysight Technologies, Inc., Santa Rosa, CA (US);

Inventors:

Kenichi Takano, Hino, JP;

Sumio Shimonishi, Tokyo, JP;

Motochika Juso, Tokyo, JP;

Assignee:

Keysight Technologies, Inc., Santa Rosa, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/04 (2006.01); G01R 31/28 (2006.01);
U.S. Cl.
CPC ...
G01R 1/0416 (2013.01); G01R 1/0491 (2013.01); G01R 31/2831 (2013.01);
Abstract

A wafer test system includes a cabinet housing multiple instruments, a test head having multiple pin modules, and cable connecting at least some of the instruments to the pin modules. The cabinet has at least one front door, left and right side panels, a rear door, a ceiling unit, and a bottom unit. Each of the instruments has a front surface, left and right side surfaces, and a rear surface. At least some of the instruments each include at least one first connection terminal. The cabinet further includes a first space defined between the at least one front door and the front surface of each of the instruments, and a second space defined between the rear door and the front surface of each of the instruments. The first space and the second space are separated in the cabinet to separate intake air and exhaust air of the instruments.


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