The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Aug. 27, 2018
Toshiba Memory Corporation, Tokyo, JP;
Kiminori Yoshino, Kuwana Mie, JP;
TOSHIBA MEMORY CORPORATION, Tokyo, JP;
Abstract
A measurement apparatus includes a filter changing a light amount of an irradiation light, a lens irradiating a surface of a material with the irradiation light, a stage changing a focus position of the irradiation light in a depth direction of the material, an interfering light extractor causing the irradiation light to interfere with reflected light from the material, a detector detecting an intensity of interfering light obtained by interference between the irradiation light and the reflected light, and a controller calculating a height of the surface of the material based on the detected intensity of interfering light while changing a relative focus position of the irradiation light with respect to the material at a given measurement point of the surface of the material. The controller controls the filter or light source based on the detected intensity of interfering light to change the light amount of the irradiation light.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile