The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Sep. 15, 2014
Applicant:
Inficon Gmbh, Cologne, DE;
Inventors:
Silvio Decker, Cologne, DE;
Michael Dauenhauer, Cologne, DE;
Daniel Wetzig, Cologne, DE;
Hjalmar Bruhns, Bonn, DE;
Assignee:
INFICON GmbH, Cologne, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04F 5/54 (2006.01); G01M 3/22 (2006.01); F04F 5/22 (2006.01); G01M 3/20 (2006.01); F04F 5/44 (2006.01);
U.S. Cl.
CPC ...
F04F 5/54 (2013.01); F04F 5/22 (2013.01); F04F 5/44 (2013.01); G01M 3/205 (2013.01); G01M 3/229 (2013.01);
Abstract
A device for evacuating a film chamber using a pump system that comprises at least two vacuum pumps, designed to evacuate the film chamber alternately. A suction capacity of the first vacuum pump is greater than that of the second vacuum pump and the final pressure achievable by the first vacuum pump is less than that of the second vacuum pump.