The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 24, 2020

Filed:

Apr. 05, 2017
Applicant:

Jgc Catalysts and Chemicals Ltd., Kawasaki-shi, JP;

Inventors:

Yuji Tawarazako, Kitakyushu, JP;

Michio Komatsu, Kitakyushu, JP;

Kazuhiro Nakayama, Kitakyushu, JP;

Yukihiro Iwasaki, Kitakyushu, JP;

Yoshinori Wakamiya, Kitakyushu, JP;

Shota Kawakami, Kitakyushu, JP;

Shinya Usuda, Kitakyushu, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 3/14 (2006.01); C01B 33/18 (2006.01); H01L 21/304 (2006.01); B24B 37/00 (2012.01); C01B 33/149 (2006.01); C09G 1/00 (2006.01); C09G 1/04 (2006.01); C09G 1/06 (2006.01); C09K 13/06 (2006.01); B24B 1/00 (2006.01); B24B 37/04 (2012.01); C09G 1/02 (2006.01); H01L 21/306 (2006.01); H01L 21/3105 (2006.01);
U.S. Cl.
CPC ...
C09K 3/1436 (2013.01); B24B 1/00 (2013.01); B24B 37/00 (2013.01); B24B 37/044 (2013.01); C01B 33/149 (2013.01); C01B 33/18 (2013.01); C09G 1/00 (2013.01); C09G 1/02 (2013.01); C09G 1/04 (2013.01); C09G 1/06 (2013.01); C09K 3/14 (2013.01); C09K 13/06 (2013.01); H01L 21/304 (2013.01); H01L 21/30625 (2013.01); H01L 21/31053 (2013.01);
Abstract

Disclosed is a silica-based composite fine particle dispersion including a silica-based composite fine particle which comprises a mother particle containing amorphous silica as a main component with a child particle containing crystalline ceria as a main component on a surface thereof. Features of the silica-based composite fine particle include a silica to ceria mass ratio of 100:11 to 316, and when subjected to X-ray diffraction, only the crystalline phase of ceria is detected, and when subjected to X-ray diffraction for measurement, the crystalline ceria has a crystallite diameter of 10 to 25 nm.


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