The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Sep. 11, 2017
Tdk Corporation, Tokyo, JP;
Jun Hirabayashi, Tokyo, JP;
Yutaka Matsuo, Tokyo, JP;
Minoru Fujita, Tokyo, JP;
Jun Arima, Tokyo, JP;
TDK CORPORATION, Tokyo, JP;
Abstract
An object of the present invention is to provide a Schottky barrier diode using gallium oxide capable of suppressing heat generation and enhancing heat radiation performance while ensuring mechanical strength and handling performance. A Schottky barrier diode includes a semiconductor substratemade of gallium oxide having a recessed parton the second surface, an epitaxial layermade of gallium oxide and provided on a first surfaceof the semiconductor substrate; an anode electrodeprovided at a position overlapping the recessed partas viewed in the lamination direction and brought into Schottky contact with the epitaxial layer, and a cathode electrodeprovided in the recessed partof the semiconductor substrateand brought into ohmic contact with the semiconductor substrate. According to the present invention, since the thickness of the semiconductor substrate at a part thereof where forward current flows is selectively reduced, this makes it possible to suppress heat generation and to enhance heat radiation performance while ensuring mechanical strength and handling performance. Thus, even though gallium oxide having a low heat conductivity is used as the material of the semiconductor substrate, a temperature rise of the element can be suppressed.