The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Dec. 05, 2018
Tokyo Electron Limited, Tokyo, JP;
Toshiyuki Kobayashi, Miyagi, JP;
Ryu Kitahara, Miyagi, JP;
Kazuya Koshiishi, Yamanashi, JP;
Junya Sato, Miyagi, JP;
Shun Suto, Miyagi, JP;
Toshimitsu Chiba, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A teaching method according to an embodiment is for a transfer device including a substrate holding unit including a suction port for holding a substrate by applying suction, an actuation mechanism for moving the substrate holding unit, and a pressure detecting unit for detecting a pressure in a suction path communicating with the suction port. The method includes: moving the substrate holding unit under the substrate; moving the substrate holding unit upward toward the substrate, while applying suction to the suction path and detecting the pressure in the suction path; determining whether or not the substrate holding unit has touched the substrate, based on the pressure in the suction path; and storing, as a standard position, a position of the substrate holding unit at a time of determining that the substrate holding unit has touched the substrate.