The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Sep. 05, 2016
Eugene Technology Co., Ltd., Yongin-Si, KR;
Cha Young Yoo, Suwon-Si, KR;
Sung Tae Je, Yongin-Si, KR;
Kyu Jin Choi, Yongin-Si, KR;
Ja Dae Ku, Suwon-Si, KR;
Jun Kim, Yongin-Si, KR;
Bong Ju Jung, Hwaseong-Si, KR;
Kyung Seok Park, Hwaseong-Si, KR;
Yong Ki Kim, Osan-Si, KR;
Jae Woo Kim, Bucheon-Si, KR;
EUGENE TECHNOLOGY CO., LTD., , KR;
Abstract
In accordance with an exemplary embodiment, a substrate processing apparatus includes: a tube assembly having an inner space in which substrates are processed and assembled by laminating a plurality of laminates, a substrate holder configured to support the plurality of substrates in a multistage manner in the inner space of the tube assembly, a gas supply unit installed on one side of the tube assembly to supply a process gas to each of the plurality of substrates in the inner space; and an exhaust unit connected to the tube assembly to exhaust the process gas supplied into the inner space, the substrate processing apparatus that induces a laminar flow to supply a uniform amount of process gas to a top surface of the substrate.