The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Jan. 18, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jennifer Y. Sun, Mountain View, CA (US);
Ren-Guan Duan, Fremont, CA (US);
Jie Yuan, San Jose, CA (US);
Li Xu, San Jose, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/486 (2006.01); C04B 35/505 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67011 (2013.01); C04B 35/486 (2013.01); C04B 35/505 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3244 (2013.01); C04B 2235/77 (2013.01); C04B 2235/785 (2013.01); C04B 2235/786 (2013.01); C04B 2235/80 (2013.01); C04B 2235/96 (2013.01); C04B 2235/9607 (2013.01); C04B 2235/9669 (2013.01);
Abstract
Disclosed herein is a ceramic article or coating useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas. The ceramic article or coating is formed from a combination of yttrium oxide and zirconium oxide.