The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Jan. 30, 2018
Asml Netherlands B.v., Veldhoven, NL;
Jeroen Pieter Starreveld, Knegsel, NL;
Maurice Willem Jozef Etiënne Wijckmans, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The present invention relates to a lithographic apparatus, comprising: —a primary frame () which is provided with a functional unit (), —a secondary frame (), —a primary frame support (), which is adapted to support the primary frame onto the secondary frame, —a flexible utility connection (), adapted to connect the functional unit to an auxiliary system (), —a vibration isolation body () having a body mass, which is moveably connected to the secondary frame by a flexible passive body support () having a body support stiffness, wherein the flexible utility connection is fixed to the vibration isolation body at a distance from the primary frame.