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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10837991 B1

PDFFull Text
Date of Patent:
Nov. 17, 2020

Filed:

Mar. 28, 2018

Electrostatic capacitance measuring device

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Kippei Sugita, Miyagi, JP;

Tomohide Minami, Miyagi, JP;

Satoru Nishio, Hyogo, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorney:

Rothwell, Figg, Ernst & Manbeck, P.C.

Primary Examiner:

Vinh P Nguyen

Int. Cl.
CPC ...
G01R 27/26 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); G01R 31/28 (2006.01); H01J 37/32 (2006.01); H01L 21/677 (2006.01); H05K 1/02 (2006.01);
U.S. Cl.
CPC ...
G01R 27/2605 (2013.01); G01R 31/2831 (2013.01); H01L 21/67259 (2013.01); H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); G01R 31/2849 (2013.01); G01R 31/2865 (2013.01); G01R 31/2875 (2013.01); G01R 31/2881 (2013.01); H01J 37/32091 (2013.01); H01J 2237/334 (2013.01); H01L 21/67069 (2013.01); H01L 21/67167 (2013.01); H01L 21/67742 (2013.01); H05K 1/0237 (2013.01); H05K 2201/10151 (2013.01);
Abstract

An electrostatic capacitance measuring device includes: a base substrate; a first sensor having a first electrode, one or more second sensors each having a second electrode, and a circuit board mounted on the base substrate. The first sensor is provided along an edge of the base substrate. The second sensors are fixed on the base substrate. The circuit board is connected to the first sensor and the second sensors, and configured to output high frequency signals to the first electrode and the one or more second electrodes and obtain a first measurement value indicating an electrostatic capacitance from a voltage amplitude at the first electrode and one or more second measurement values indicating electrostatic capacitances obtained from voltage amplitudes at the one or more second electrodes. The measuring device has one or more reference surfaces fixed on the measuring device and facing the one or more second electrodes.

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