The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Jul. 26, 2018
Tokyo Electron Limited, Tokyo, JP;
Kippei Sugita, Miyagi, JP;
Tomohide Minami, Miyagi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
In a method for calibrating a measuring device by using a case which includes a case main body configured to accommodate the measuring device, a restricting portion configured to restrict translation of the measuring device accommodated in the case main body and reference surfaces provided in the case main body to face the respective sensor electrodes, a plurality of detection values is acquired in a state where translation of the measuring device accommodated in the case is restricted by the restricting portion, the reference surfaces face respective sensor electrodes of the measuring device and a high frequency signal is applied to the sensor electrodes. Then, coefficients in functions used in calculating measurement values are calibrated such that the measurement values become a predetermined value.