The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2020
Filed:
Feb. 20, 2019
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Joseph Robert Despres, Middletown, CT (US);
Edgar Daniel La Borde, Danbury, CT (US);
Robert Zeller, Boston, MA (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F17C 11/00 (2006.01); B01J 20/22 (2006.01); B01J 20/26 (2006.01); B01J 20/20 (2006.01); F17C 13/04 (2006.01);
U.S. Cl.
CPC ...
F17C 11/00 (2013.01); B01J 20/20 (2013.01); B01J 20/226 (2013.01); B01J 20/26 (2013.01); F17C 13/04 (2013.01); F17C 2201/0109 (2013.01); F17C 2205/0323 (2013.01); F17C 2205/0341 (2013.01); F17C 2205/0344 (2013.01); F17C 2205/0391 (2013.01); F17C 2205/0394 (2013.01); F17C 2270/0518 (2013.01);
Abstract
A gas supply vessel for storing and dispensing a reagent gas including a filter such that the vessel is capable of delivering the reagent gas, after it is filtered, at a high level of purity. The filter includes a porous sintered body and is effective to provide a desired level of purity of a supplied reagent gas by flowing the reagent gas through the filter during delivery from the vessel at a low pressure, at a relatively low flow rate, and with a relatively low pressure drop across the filter.