The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 2020

Filed:

Dec. 19, 2018
Applicant:

Ebara Corporation, Tokyo, JP;

Inventors:

Yoichi Nakagawa, Tokyo, JP;

Suguru Ozawa, Tokyo, JP;

Toshifumi Watanabe, Tokyo, JP;

Tao Xu, Tokyo, JP;

Assignee:

EBARA CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B01F 3/04 (2006.01); C02F 1/78 (2006.01); H01L 21/67 (2006.01); G02F 1/13 (2006.01);
U.S. Cl.
CPC ...
B01F 3/04737 (2013.01); B01F 3/04439 (2013.01); C02F 1/78 (2013.01); B01F 2003/04886 (2013.01); C02F 2201/782 (2013.01); C02F 2209/005 (2013.01); C02F 2209/23 (2013.01); C02F 2209/40 (2013.01); C02F 2209/42 (2013.01); C02F 2303/18 (2013.01); G02F 2001/1316 (2013.01); H01L 21/67051 (2013.01);
Abstract

A gas-dissolved liquid producing apparatusincludes a gas supply unit, a first liquid supply unit, a gas-dissolved liquid generator, a second liquid generator, a second liquid supply unit, a flow rate measuring unit, and a controller. The controllercontrols the supply amount of the first liquid to be supplied to the gas-dissolved liquid generatoraccording to the flow rate of circulated gas-dissolved liquid measured by the flow rate measuring unit. The gas-dissolved liquid generatordissolves gas supplied from the gas supply unitin first liquid supplied from the first liquid supply unitand second liquid supplied from the second liquid supply unitto generate gas-dissolved liquid.


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