The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2020

Filed:

Mar. 21, 2016
Applicant:

Idemitsu Kosan Co., Ltd., Tokyo, JP;

Inventors:

Koki Yano, Chiba, JP;

Hirokazu Kawashima, Chiba, JP;

Kazuyoshi Inoue, Chiba, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/786 (2006.01); C23C 14/34 (2006.01); C23C 14/16 (2006.01); C22C 30/04 (2006.01); C22C 30/06 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 27/12 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7869 (2013.01); C22C 30/04 (2013.01); C22C 30/06 (2013.01); C23C 14/165 (2013.01); C23C 14/3407 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 29/66969 (2013.01); H01L 29/78606 (2013.01); H01L 29/78609 (2013.01); H01L 29/78633 (2013.01); H01L 29/78693 (2013.01); H01L 27/1225 (2013.01);
Abstract

A field effect transistor including: a substrate, and at least gate electrode, a gate insulating film, a semiconductor layer, a protective layer for the semiconductor layer, a source electrode and a drain electrode provided on the substrate, wherein the source electrode and the drain electrode are connected with the semiconductor layer therebetween, the gate insulating film is between the gate electrode and the semiconductor layer, the protective layer is on at least one surface of the semiconductor layer, the semiconductor layer includes an oxide containing In atoms, Sn atoms and Zn atoms, the atomic composition ratio of Zn/(In+Sn+Zn) is 25 atom % or more and 75 atom % or less, and the atomic composition ratio of Sn/(In+Sn+Zn) is less than 50 atom %.


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