The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2020

Filed:

Jan. 15, 2019
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Bahman Hekmatshoartabari, White Plains, NY (US);

Chung H. Lam, Peekskill, NY (US);

Fabio Carta, Yorktown Heights, NY (US);

Matthew J. BrightSky, Pound Ridge, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/24 (2006.01); G11C 13/00 (2006.01); H01L 45/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/2409 (2013.01); G11C 13/0004 (2013.01); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01); H01L 21/02532 (2013.01); H01L 27/2463 (2013.01); H01L 45/06 (2013.01); H01L 45/144 (2013.01); H01L 45/1616 (2013.01); H01L 45/1675 (2013.01); G11C 2213/72 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01);
Abstract

A method for deactivating memory cells affected by the presence of grain boundaries in polycrystalline selection devices includes crystallizing a semiconductor layer in a diode stack to form a polycrystalline layer for selection diodes formed in a crossbar array. To achieve a crystalline state in phase change memory elements coupled to corresponding selection diodes perform an anneal. Memory cells having shunted selection diodes due to grain boundaries are identified by scanning the array using sense voltages. A second voltage larger than the sense voltages is applied to the phase change memory elements gated by the shunted selection diodes such that the phase change memory elements gated by the shunted diodes achieve a permanently high resistive state.


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