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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10825708 B1

PDFFull Text
Date of Patent:
Nov. 03, 2020

Filed:

Oct. 12, 2012

Process kit components for use with an extended and independent rf powered cathode substrate for extreme edge tunability

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Valentin Todorow, Palo Alto, CA (US);

Samer Banna, San Jose, CA (US);

Imad Yousif, San Jose, CA (US);

Albert Wang, Concord, CA (US);

Gary Leray, Mountain View, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Moser Taboada

Primary Examiner:

David P Bryant

Assistant Examiner:

Nirvana Deonauth

Int. Cl.
CPC ...
H01L 21/683 (2006.01); H01J 37/32 (2006.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); H01J 37/32642 (2013.01); H01J 37/32715 (2013.01); H02N 13/00 (2013.01); H01L 21/6831 (2013.01); Y10T 279/23 (2015.01);
Abstract

Process kit components for use with a substrate support of a process chamber are provided herein. In some embodiments, a process kit ring may include a ring shaped body having an outer edge, an inner edge, a top surface and a bottom, wherein the outer edge has a diameter of about 12.473 inches to about 12.479 inches and the inner edge has a diameter of about 11.726 inches to about 11.728 inches, and wherein the ring shaped body has a height of about 0.116 to about 0.118 inches; and a plurality of protrusions disposed on the top surface of the ring shaped body, each of the plurality of protrusions disposed symmetrically about the ring shaped body.

Find Patent Forward Citations

Todorow, Valentin. (2020). Process kit components for use with an extended and independent rf powered cathode substrate for extreme edge tunability (U.S. Patent No. 10825708). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10825708

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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