The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2020
Filed:
Dec. 19, 2018
Applicant:
Semes Co., Ltd., Chungcheongnam-do, KR;
Inventors:
Buyoung Jung, Cheonan-si, KR;
Jonghan Kim, Asan-si, KR;
Young Jin Jang, Daegu, KR;
Jin Tack Yu, Chungcheongnam-do, KR;
Youngjun Choi, Asan-si, KR;
Daehun Kim, Pyeongtaek-si, KR;
Byungsun Bang, Gyeonggi-do, KR;
Jonghyeon Woo, Asan-si, KR;
Heehwan Kim, Sejong-si, KR;
Cheol-Yong Shin, Seoul, KR;
Gui Su Park, Asan-si, KR;
Assignee:
SEMES CO., LTD., Chungcheongnam-Do, KR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67051 (2013.01); H01L 21/67017 (2013.01); H01L 21/67023 (2013.01); H01L 21/6835 (2013.01);
Abstract
Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.