The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2020

Filed:

Jun. 05, 2018
Applicants:

Imec Vzw, Leuven, BE;

Katholieke Universiteit Leuven, Ku Leuven R&d, Leuven, BE;

Inventor:

Jan Doise, Leuven, BE;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/311 (2006.01); H01L 21/027 (2006.01); H01L 21/02 (2006.01); C30B 25/18 (2006.01); H01L 21/768 (2006.01); B81C 1/00 (2006.01); G03F 7/00 (2006.01); C30B 29/06 (2006.01); H01L 21/033 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0271 (2013.01); B81C 1/00031 (2013.01); C30B 25/18 (2013.01); C30B 29/06 (2013.01); G03F 7/0002 (2013.01); H01L 21/0274 (2013.01); H01L 21/02118 (2013.01); H01L 21/02282 (2013.01); H01L 21/0337 (2013.01); H01L 21/0338 (2013.01); H01L 21/3086 (2013.01); H01L 21/31144 (2013.01); H01L 21/76816 (2013.01); H01L 21/76838 (2013.01); B81C 2201/0149 (2013.01);
Abstract

A method for directing a self-assembly of a block copolymer comprising a first and a second block is provided. The method including: providing a substrate comprising at least one concavity therein, the concavity comprising at least a sidewall and a bottom, the bottom having a preferential wetting affinity for the second block with respect to the first block; grafting a first grafting material onto the sidewall, selectively with respect to the bottom, the first grafting material having a preferential wetting affinity for the first block with respect to the second block; grafting a second grafting material onto the bottom and optionally onto the sidewall, the second grafting material having a preferential wetting affinity towards the first block with respect to the second block; and providing the block copolymer on the substrate, at least within the at least one concavity.


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