The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2020

Filed:

Apr. 21, 2017
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Thomas Jongwan Kwon, Dublin, CA (US);

Sungwon Jun, San Jose, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 21/02 (2006.01); H01L 29/04 (2006.01); H01L 21/28 (2006.01); H01L 29/423 (2006.01); H01L 29/788 (2006.01); H01L 27/11524 (2017.01); H01L 27/11556 (2017.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02592 (2013.01); H01L 27/11524 (2013.01); H01L 27/11556 (2013.01); H01L 29/04 (2013.01); H01L 29/0669 (2013.01); H01L 29/40117 (2019.08); H01L 29/42332 (2013.01); H01L 29/7889 (2013.01); H01L 21/0262 (2013.01); H01L 21/02532 (2013.01); H01L 21/02601 (2013.01); H01L 21/02639 (2013.01); H01L 29/1604 (2013.01);
Abstract

Provided are an improved memory device and a method of manufacturing the same. In one embodiment, the memory device may include a vertical stack of alternating oxide layer and nitride layer, the vertical stack having a channel region formed therethrough, a plurality of nanostructures selectively formed on nitride layer of the vertical stack, and a gate oxide layer disposed on exposed surfaces of the channel region, the gate oxide layer encapsulating the plurality of nanostructures formed on the nitride layer. The nanostructures may be a group IV semiconductor compound such as silicon germanium (SiGe).


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