The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2020

Filed:

Oct. 10, 2019
Applicant:

Renesas Electronics Corporation, Tokyo, JP;

Inventors:

Tetsuya Iida, Ibaraki, JP;

Yasutaka Nakashiba, Ibaraki, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 25/16 (2006.01); H01L 31/105 (2006.01); H01L 31/02 (2006.01); H01L 31/0232 (2014.01); H01L 23/373 (2006.01); H01L 23/00 (2006.01); G02B 6/42 (2006.01); H04B 10/40 (2013.01);
U.S. Cl.
CPC ...
H01L 25/167 (2013.01); G02B 6/42 (2013.01); G02B 6/4214 (2013.01); H01L 23/3736 (2013.01); H01L 24/80 (2013.01); H01L 24/94 (2013.01); H01L 31/02005 (2013.01); H01L 31/02327 (2013.01); H01L 31/105 (2013.01); H04B 10/40 (2013.01); H01L 2224/80895 (2013.01);
Abstract

The semiconductor module includes a semiconductor chip and a semiconductor chip. The semiconductor chip includes an optical device such as an optical waveguide, an optical receiver, and a grating coupler, and a wiring formed over the optical device. The semiconductor chip includes a semiconductor element such as a MISFET formed in the semiconductor substrate, and a wiring formed over the semiconductor element. a top surface of the semiconductor chip is laminated to a top surface of the semiconductor chip such that the wirings are in direct contact with each other. In the semiconductor substrate, a through hole having a circular shape in plan view is formed, in the through hole, an insulating film is formed as a cladding layer, and the semiconductor substrate surrounded by the through hole constitutes an optical waveguide.


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