The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Dec. 07, 2017
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/68 (2006.01); H01L 23/544 (2006.01); B08B 3/04 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); B08B 3/08 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67766 (2013.01); B08B 3/04 (2013.01); B08B 3/047 (2013.01); H01L 21/67057 (2013.01); H01L 21/67086 (2013.01); H01L 21/67173 (2013.01); H01L 21/67718 (2013.01); H01L 21/67742 (2013.01); H01L 21/67754 (2013.01); H01L 21/67757 (2013.01); H01L 21/67778 (2013.01); H01L 21/67781 (2013.01); H01L 21/68 (2013.01); H01L 21/681 (2013.01); H01L 21/68707 (2013.01); H01L 23/544 (2013.01); B08B 3/08 (2013.01); H01L 2223/54426 (2013.01); H01L 2223/54493 (2013.01);
Abstract
A substrate processing apparatus includes a processing section that performs a batch process to a plurality of substrates. A first substrate transport mechanism removes one of substrates contained in a substrate container placed on a stage, and transport the substrate to a position adjusting unit, in which the position of the substrate in the rotating direction of the substrate is adjusted, and transports the substrate back to the substrate container. Then a second substrate transport mechanism collectively removes from the substrate container the substrates whose positions in the rotating direction have been adjusted by the position adjusting unit.