The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Feb. 04, 2019
Applicant:
Ebara Corporation, Tokyo, JP;
Inventor:
Ryuya Koizumi, Tokyo, JP;
Assignee:
EBARA CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/66 (2006.01); G01N 21/95 (2006.01); C25D 17/06 (2006.01); C25D 17/00 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/673 (2013.01); C25D 17/001 (2013.01); C25D 17/06 (2013.01); G01N 21/9505 (2013.01); H01L 21/6723 (2013.01); H01L 21/67028 (2013.01); H01L 21/67057 (2013.01); H01L 21/67173 (2013.01); H01L 21/67288 (2013.01); H01L 21/67751 (2013.01); H01L 22/12 (2013.01); H01L 2224/11462 (2013.01);
Abstract
The present invention provides a substrate holding member comprising: a first holding member; a second holding member that cooperates with the first holding member to hold the substrate therebetween; and a transparent portion provided in at least one of the first and second holding members.