The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Apr. 05, 2019
Disco Corporation, Tokyo, JP;
Shinichi Fujisawa, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
An expanding method includes a plate cooling step of cooing a plate of a cooling/heating unit, which includes the plate for contact with a workpiece and a Peltier element for cooling or heating the plate, a workpiece cooling step of bringing the plate into contact with the workpiece through the expansion sheet to cool the workpiece, after the plate cooling step is performed, an expanding step of expanding the expansion sheet, after the workpiece cooling step is performed, a plate heating step of heating the plate, after the expanding step is performed, and a workpiece heating step of bringing the plate into contact with the workpiece through the expansion sheet to heat the workpiece, after the plate heating step is performed.