The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Dec. 22, 2015
Applicant:
Hitachi High-tech Corporation, Minato-ku, Tokyo, JP;
Inventor:
Takahiro Jingu, Tokyo, JP;
Assignee:
Hitachi High-Tech Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/24455 (2013.01); H01J 2237/2802 (2013.01);
Abstract
A charged particle beam apparatus includes an irradiation system that supplies a converged charged particle beam to a sample and scans the sample with the charged particle beam, an imaging optical system that images the energy generated in the sample, a detection system that detects an image formed by the imaging optical system with an avalanche photodiode array, and a control unit that changes a pixel to be operated in a Geiger mode among pixels configuring the avalanche photodiode array according to movement of an irradiation range of the energy.