The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Feb. 03, 2017
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Hans Butler, Best, NL;
Cornelius Adrianus Lambertus De Hoon, Eindhoven, NL;
Fransiscus Mathijs Jacobs, Asten, NL;
Pavel Kagan, Eindhoven, NL;
Jeroen Pieter Starreveld, Eindhoven, NL;
Maurice Willem Jozef Etienne Wijckmans, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); F16F 9/02 (2006.01); F16F 15/023 (2006.01); F16F 13/00 (2006.01); F16F 15/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/709 (2013.01); F16F 9/0209 (2013.01); F16F 13/00 (2013.01); F16F 15/0232 (2013.01); G03F 7/70841 (2013.01); F16F 15/0275 (2013.01); F16F 2222/126 (2013.01); F16F 2228/066 (2013.01); F16F 2232/08 (2013.01);
Abstract
The invention relates to a vibration isolator, comprising: