The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
May. 30, 2017
Applicant:
Lam Research Ag, Villach, AT;
Inventor:
Dries Dictus, Villach, AT;
Assignee:
LAM RESEARCH AG, Villach, AT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 22/48 (2006.01); C23C 22/73 (2006.01); C23C 22/60 (2006.01); C23C 22/00 (2006.01);
U.S. Cl.
CPC ...
C23C 22/73 (2013.01); C23C 22/60 (2013.01);
Abstract
A liquid passivation mixture for passivating an outer layer of a substrate comprises a first material selected from group consisting of sulfur or selenium and a base selected from a group consisting of quaternary ammonium compound, sodium hydroxide (NaOH), potassium hydroxide (KOH), and amine.
Dictus, Dries. (2020). Passivation mixture and systems and methods for selectively passivating substrate materials including germanium or type iii-iv materials using the passivation mixture (U.S. Patent No. 10815573). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10815573
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile