The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 27, 2020
Filed:
Apr. 16, 2018
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Vahid Firouzdor, San Mateo, CA (US);
Biraja P. Kanungo, San Jose, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Martin J. Salinas, San Jose, CA (US);
Jared Ahmad Lee, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/08 (2006.01); C23C 14/02 (2006.01); C23C 16/458 (2006.01); C23C 16/50 (2006.01); C23C 14/06 (2006.01); C23C 14/22 (2006.01);
U.S. Cl.
CPC ...
C23C 14/081 (2013.01); C23C 14/024 (2013.01); C23C 14/0635 (2013.01); C23C 14/08 (2013.01); C23C 14/083 (2013.01); C23C 14/221 (2013.01); C23C 16/4581 (2013.01); C23C 16/50 (2013.01);
Abstract
An article such as a susceptor includes a body of a thermally conductive material coated by a first protective layer and a second protective layer over a surface of the body. The first protective layer is a thermally conductive ceramic. The second protective layer covers the first protective layer and is a plasma resistant ceramic thin film that is resistant to cracking at temperatures of 650 degrees Celsius.