The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Dec. 01, 2017
Applicant:
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Inventors:
Assignee:
Sumitomo Electric Industries, Ltd., Osaka-shi, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 29/04 (2006.01); H01L 29/34 (2006.01); H01L 29/66 (2006.01); H01L 29/739 (2006.01); H01L 29/744 (2006.01); H01L 29/78 (2006.01); H01L 29/868 (2006.01); H01L 29/872 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1608 (2013.01); H01L 21/02378 (2013.01); H01L 21/30625 (2013.01); H01L 29/045 (2013.01); H01L 29/34 (2013.01); H01L 29/66068 (2013.01); H01L 29/7395 (2013.01); H01L 29/744 (2013.01); H01L 29/7802 (2013.01); H01L 29/868 (2013.01); H01L 29/872 (2013.01);
Abstract
It is assumed that a defect satisfying relations of Formula 1 and Formula 2 is a first defect, where an off angle is θ. It is assumed that a defect having an elongated shape when viewed in a direction perpendicular to the second main surface, and satisfying relations of Formula 3 and Formula 4 is a second defect. A value obtained by dividing the number of the second defect by the sum of the number of the first defect and the number of the second defect is greater than 0.5.