The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2020

Filed:

Apr. 24, 2019
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Wei Cheng Wu, Zhubei, TW;

Chien-Hung Chang, Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11573 (2017.01); H01L 29/423 (2006.01); H01L 27/11568 (2017.01); H01L 29/51 (2006.01); H01L 29/66 (2006.01); H01L 21/28 (2006.01); H01L 27/11536 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11573 (2013.01); H01L 27/11536 (2013.01); H01L 27/11568 (2013.01); H01L 29/40114 (2019.08); H01L 29/40117 (2019.08); H01L 29/42328 (2013.01); H01L 29/42344 (2013.01); H01L 29/513 (2013.01); H01L 29/517 (2013.01); H01L 29/66545 (2013.01);
Abstract

The present disclosure relates to a method of forming an integrated circuit (IC). In some embodiments, a substrate is provided comprising a memory region and a logic region disposed adjacent to the memory region. The memory region comprises a non-volatile memory (NVM) device having a control gate electrode and a select gate electrode disposed between two neighboring source/drain regions over a substrate. The control gate electrode and the select gate electrode comprise polysilicon. The logic region comprises a logic device including a metal gate electrode disposed between two neighboring source/drain regions over a logic gate dielectric and having bottom and sidewall surfaces covered by a high-k gate dielectric layer.


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