The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Jun. 28, 2019
Imec Vzw, Leuven, BE;
Gaspard Hiblot, Heverlee, BE;
Stefaan Van Huylenbroeck, Kessel-Lo, BE;
Geert Van der Plas, Leuven, BE;
IMEC vzw, Leuven, BE;
Abstract
A method of producing a through semiconductor via (TSV) connection is disclosed. In one aspect, an opening of the TSV is produced for contacting a first semiconductor die bonded to a second die or to a temporary carrier. The first die includes fin-shaped devices in the front end of line of the die. Etching of the TSV opening does not end on a metal pad, but the opening is etched until reaching a well that is formed of material of a first doping type and formed in the first die amid semiconductor material of a second doping type opposite the first. After filling the TSV opening with a conductive material, the TSV connects to a conductor of an intermediate metallization (IM) of the first die through at least one fin extending from the well and connected to the conductor. A package of dies comprising at least one TSV produced by the above method is also disclosed.