logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10811301 B1

PDFFull Text
Date of Patent:
Oct. 20, 2020

Filed:

Oct. 22, 2019

Dual-zone heater for plasma processing

Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Xing Lin, San Jose, CA (US);

Jianhua Zhou, Campbell, CA (US);

Juan Carlos Rocha-Alvarez, San Carlos, CA (US);

Ramprakash Sankarakrishnan, Santa Clara, CA (US);

Assignee:

APPLIED MATERIALS, INC., Santa Clara, CA (US);

Attorney:

Patterson + Sheridan LLP

Primary Examiner:

Jeffrie R Lund

Assistant Examiner:

Mirza Israr Javed

Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68792 (2013.01); C23C 16/4581 (2013.01); C23C 16/4586 (2013.01); H01J 37/32715 (2013.01); H01J 37/32724 (2013.01); H01L 21/67103 (2013.01);
Abstract

A method and apparatus for a pedestal is provided. In one embodiment, the pedestal includes a body comprising a ceramic material having a flange, one or more heating elements embedded in the body, a first shaft coupled to the flange, and a second shaft coupled to the first shaft; wherein the second shaft includes a plurality of fluid channels formed therein that terminate in the second shaft.

Find Patent Forward Citations

Lin, Xing. (2020). Dual-zone heater for plasma processing (U.S. Patent No. 10811301). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10811301

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…