The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Mar. 20, 2019
Tescan Brno S.r.o., Brno, CZ;
Tescan Tempe, Llc, Tempe, AZ (US);
Stanislav Petras, Strakonice, CZ;
Bohumila Lencova, Kurim, CZ;
Gerd Ludwig Benner, Aalen, DE;
Jon Karl Weiss, Tempe, AZ (US);
TESCAN BRNO s.r.o, Brno, CZ;
TESCAN TEMPE, LLC, Tempe, AZ (US);
Abstract
A method for automatically aligning a scanning tunneling electron microscope (STEM) for acquiring precession electron diffraction (PED) mapping data includes the generation of an incident electron beam aligned with a STEM optic axis and focused on a sample region. A non-inclined signal is acquired of the spatial distribution from the sample region, by scanning the aligned incident beam across multiple discrete locations and acquiring a signal associated with each location. The method can further include the inclination of the incident electron beam to a fixed inclination angle relative to the optic axis and then acquiring an inclined signal spatial distribution from the sample region by scanning the inclined incident beam across the multiple discrete locations while applying a cyclic azimuthal scanning protocol to the inclined beam and acquiring a signal associated with each location. An azimuthal spatial alignment correction is determined by comparing the non-inclined and inclined signal spatial distributions.