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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10809515 B1

PDFFull Text
Date of Patent:
Oct. 20, 2020

Filed:

Sep. 27, 2017

Observation method and specimen observation apparatus

Applicant:

Jeol Ltd., Tokyo, JP;

Inventor:

Katsuyuki Suzuki, Tokyo, JP;

Assignee:

JEOL Ltd., Tokyo, JP;

Attorney:

The Webb Law Firm

Primary Examiner:

Jonathan R Messmore

Int. Cl.
CPC ...
H01J 37/28 (2006.01); G02B 21/36 (2006.01); H01J 37/26 (2006.01); G02B 27/32 (2006.01); G02B 21/34 (2006.01); G02B 21/02 (2006.01); G02B 21/26 (2006.01); H01J 37/20 (2006.01); G06K 9/00 (2006.01); G06K 9/32 (2006.01);
U.S. Cl.
CPC ...
G02B 21/365 (2013.01); G02B 21/025 (2013.01); G02B 21/26 (2013.01); G02B 21/34 (2013.01); G02B 27/32 (2013.01); H01J 37/20 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01); G06K 9/00134 (2013.01); G06K 2009/3225 (2013.01); H01J 2237/20285 (2013.01); H01J 2237/20292 (2013.01); H01J 2237/2813 (2013.01);
Abstract

Provided is an observation method including: acquiring an observed image that has been photographed by the first specimen observation apparatus with the specimen holder being mounted on the first specimen stage, the observed image having an observation target position of a specimen positioned at a center thereof, and including the plurality of markers (Step S); acquiring pixel coordinates of each of the plurality of markers in the observed image (Step S); acquiring stage coordinates of each of the plurality of markers on the second specimen stage having the specimen holder mounted thereon (Step S); and converting, based on the pixel coordinates of the plurality of markers and the stage coordinates of the plurality of markers, pixel coordinates of the center of the observed image into stage coordinates to move the second specimen stage to the obtained stage coordinates (Step S).

Find Patent Forward Citations

Suzuki, Katsuyuki. (2020). Observation method and specimen observation apparatus (U.S. Patent No. 10809515). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10809515

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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