The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2020

Filed:

Dec. 18, 2017
Applicant:

Nxp Usa, Inc., Austin, TX (US);

Inventors:

Jun Tang, Gilbert, AZ (US);

Andrew C. McNeil, Chandler, AZ (US);

Kajal Rahimian Kordestani, Scottsdale, AZ (US);

Assignee:

NXP USA, Inc., Austin, TX (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01C 19/5656 (2012.01); G01P 15/13 (2006.01); G01P 15/18 (2013.01); G01C 19/5755 (2012.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01P 15/0802 (2013.01); G01C 19/5656 (2013.01); G01C 19/5755 (2013.01); G01P 15/125 (2013.01); G01P 15/13 (2013.01); G01P 15/18 (2013.01); G01P 2015/0837 (2013.01); G01P 2015/0848 (2013.01);
Abstract

A single axis inertial sensor includes a proof mass spaced apart from a surface of a substrate. The proof mass has first, second, third, and fourth sections. The third section diagonally opposes the first section relative to a center point of the proof mass and the fourth section diagonally opposes the second section relative to the center point. A first mass of the first and third sections is greater than a second mass of the second and fourth sections. A first lever structure is connected to the first and second sections, a second lever structure is connected to the second and third sections, a third lever structure is connected to the third and fourth sections, and a fourth lever structure is connected to the fourth and first sections. The lever structures enable translational motion of the proof mass in response to Z-axis linear acceleration forces imposed on the sensor.


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