The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2020
Filed:
Oct. 24, 2017
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Assignee:
Nikon Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/04 (2018.01); G01N 23/046 (2018.01); G01B 15/04 (2006.01); G01N 23/083 (2018.01); G01N 23/18 (2018.01); G01B 15/00 (2006.01);
U.S. Cl.
CPC ...
G01N 23/046 (2013.01); G01B 15/04 (2013.01); G01N 23/04 (2013.01); G01N 23/083 (2013.01); G01N 23/18 (2013.01); G01B 15/00 (2013.01); G01N 2223/3306 (2013.01); G01N 2223/3307 (2013.01); G01N 2223/3308 (2013.01); G01N 2223/419 (2013.01);
Abstract
The X-ray inspection device includes a radiation source that irradiates X-rays toward a specimen that is rotated; a detector that detects transmitted X-rays irradiated by the radiation source, and passed through the specimen, and output a plurality of detection data for each angle of rotation; and a region extracting unit that extracts a region where the specimen is projected onto the detector, using the plurality of detection data.