The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2020
Filed:
Nov. 16, 2018
Applicant:
Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;
Inventors:
Kozo Makiyama, Kawasaki, JP;
Yuichi Minoura, Machida, JP;
Assignee:
FUJITSU LIMITED, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/08 (2006.01); H01L 21/02 (2006.01); H01L 21/225 (2006.01); H01L 29/66 (2006.01); H01L 21/285 (2006.01); H01L 29/778 (2006.01); H01L 29/20 (2006.01); H01L 21/3065 (2006.01); H01L 21/308 (2006.01); H01L 21/311 (2006.01); H01L 29/423 (2006.01); H01L 29/207 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0891 (2013.01); H01L 21/02576 (2013.01); H01L 21/02631 (2013.01); H01L 21/02639 (2013.01); H01L 21/2258 (2013.01); H01L 21/28581 (2013.01); H01L 29/0847 (2013.01); H01L 29/66462 (2013.01); H01L 29/7786 (2013.01); H01L 29/7787 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/3065 (2013.01); H01L 21/3081 (2013.01); H01L 21/3086 (2013.01); H01L 21/31111 (2013.01); H01L 29/2003 (2013.01); H01L 29/207 (2013.01); H01L 29/42376 (2013.01);
Abstract
A compound semiconductor device includes: a compound semiconductor area in which a compound semiconductor plug is embedded and formed; and an ohmic electrode provided on the compound semiconductor plug, wherein the compound semiconductor plug includes, in a side surface portion that is as an interface with the compound semiconductor area, a high concentration dopant layer containing a dopant whose concentration is higher than that of other portions.