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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10804284 B1

PDFFull Text
Date of Patent:
Oct. 13, 2020

Filed:

Apr. 11, 2018

Three-dimensional memory device containing bidirectional taper staircases and methods of making the same

Applicant:

Sandisk Technologies Llc, Plano, TX (US);

Inventors:

Yasushi Ishii, Yokkaichi, JP;

Jun Akaiwa, Yokkaichi, JP;

Kiyokazu Shishido, Yokkaichi, JP;

Hiroyuki Ogawa, Nagoya, JP;

Assignee:

SANDISK TECHNOLOGIES LLC, Addison, TX (US);

Attorney:

The Marbury Law Group PLLC

Primary Examiner:

Bryan R Junge

Int. Cl.
CPC ...
H01L 27/11582 (2017.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01); H01L 21/311 (2006.01); H01L 21/768 (2006.01); H01L 27/11521 (2017.01); H01L 27/11526 (2017.01); H01L 27/11556 (2017.01); H01L 27/11568 (2017.01); H01L 27/11573 (2017.01); H01L 29/10 (2006.01); H01L 21/3105 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/31111 (2013.01); H01L 21/31144 (2013.01); H01L 21/76802 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 27/11521 (2013.01); H01L 27/11526 (2013.01); H01L 27/11556 (2013.01); H01L 27/11568 (2013.01); H01L 27/11573 (2013.01); H01L 29/1037 (2013.01); H01L 21/0217 (2013.01); H01L 21/02164 (2013.01); H01L 21/31053 (2013.01);
Abstract

A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory stack structures vertically extending through the alternating stack, each memory stack structure including a memory film and a vertical semiconductor channel, and a contact well set that includes contact wells extending through a respective upper region of the alternating stack. Each of the contact wells contains first stepped surfaces which have a stepwise descending vertical profile along a first horizontal direction and second stepped surfaces which have a stepwise descending vertical profile along a second horizontal direction which is perpendicular to the first horizontal direction.

Find Patent Forward Citations

Ishii, Yasushi. (2020). Three-dimensional memory device containing bidirectional taper staircases and methods of making the same (U.S. Patent No. 10804284). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10804284

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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